1、
As we shrink MEMS to NEMS, device physics becomes increasingly dominated by the surfaces.
当我们把尺寸从mems缩小到NEMS时, 表面在元件物理的地位就变得越加重要.
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2、
NEMS sensors are the electro-mechanical sensors, whose characteristic dimensions are in nanometers.
纳机电传感器指基于纳机电效应的 、 其特征尺寸在纳米级的传感器.
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