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A survey of current international research on MEMS is presented.
本文对国外微电子机械系统(MEMS) 的研究现况作了评述.
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Studying on dynamic characteristic of MEMS micro-device depends on relevant testing system.
MEMS微器件动态特性的研究需要相应的测试系统.
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Then, communication devices based on MEMS technology their applications are reviewed.
重点综述了基于MEMS技术的通信器件及其应用.
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Polyimide has become a main material for sacrificial layer in MEMS switch.
目前,聚酰亚胺已成为MEMS开关中一种主要的牺牲层材料.
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The automatic optimization algorithms of structural parameters of MEMS devices are studied.
研究了MEMS器件结构参数的自动优化算法及其实现技术.
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A RF MEMS switch is designed by computer aided design ( CAD ) method.
应用计算机辅助设计 ( CAD ) 方法模拟设计一种射频微机械(RF-MEMS)开关.
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The compensating method for MEMS gyroscope random drift error is discussed.
从工程实用的角度出发,探讨了MEMS陀螺仪随机漂移误差的有效补偿方法.
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A MEMS sensor research platform based on micro-converter AD μ C 832 is presented.
提出一种基于微转换器(Micro-Converter)的MEMS传感器组合研究平台.
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Piezoelectric actuator is one of the most development prospects in MEMS actuators.
压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一.
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A micro direct methanol fuel cell ( μ DMFC ) using MEMS technology is reported.
报道了一种利用MEMS技术制作的微型直接甲醇燃料电池.
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The widely use of MEMS prompted the extensive research of Power MEMS.
随着微机电系统(MEMS) 的快速发展,为MEMS提供 电能的微小型功率器件(PowerMEMS)逐步得到了广泛的研制.
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The development of Power MEMS is associated with MEMS closely.
PowerMEMS (功率微机电系统)与MEMS( 微机电系统)发展密切相关.
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