xrl

X ray lithography ( XRL) is a very important batch exposure technology in micro/ nanometer lithography. The development of XRL requires new X ray source, new type of stepper, new X ray masks and advanced related processing technology.

X－ray光刻（XRL）是微／纳米光刻技术中至关重要的批量复制技术，XRL的发展在于不断对X－ray源、新型的stepper、X线掩模版以及相关处理工艺的研究进展。

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In order to test X-ray laser ( XRL) series programs, simulations of some experiments of Ne-like Ge XRL were completed, including domestic experiments driven with long-pulse ( 1ns) and international experiments driven with multiple-pulse.

介绍了用国内1ns长脉冲和国外多脉冲驱动的类氖锗的实验数据检验X光激光的理论模拟程序系列的工作。

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A sign reading China Immigration Inspection is displayed on the ground in the Mainland Port Area at West Kowloon Station, which houses the terminal for the Guangzhou-Shenzhen-Hong Kong Express Rail Link ( XRL) in Hong Kong, Saturday, Sept. 22, 2018.

2018年9月22日星期六，在香港广深港快线（XRL）终点站西九龙站，大陆港区的地面上显示着“边境候检区域”的标识，西九龙站为广深港高铁的香港终点站。

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The X ray mask give an important effect on the resolution of XRL and it's efficiency and expenses.

其中，X线掩模版不仅直接关系到XRL的分辨率水平，也极大地影响其使用效率及其费用。

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Theoretical simulation shows that, using 1% pre-pulse, if appropriate optimization of time interval between pre-and main pulse has been conducted, the output energy of XRL as well as conversion efficiency of energy can be dramatically enhanced.

理论模拟还表明，采用1%左右的预脉冲强度并对预主脉冲时间间隔进行优化，X光激光的输出能量和能量转换效率将获得大幅度提高。

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Lithography technique has been the key point to push forward the USL fabricator. X-ray lithography ( XRL) is one of the next generation lithography techniques ( NGL), which has the probability of industrialization.

光刻技术是推动集成电路制造业不断向前发展的关键技术，X射线光刻技术是下一代光刻技术的一种，具有产业化的应用前景。

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Taking the XRL aluminium bushing complex rubber roller as one example, the paper touches on the compressive stress and stretch stress of rubber and aluminium tubes running in pressure by application of static and dynamic stress and the strain theory.

本文以XRL型铝衬套复合胶辊为例，运用静态和动态应力、应变理论，分析了运转过程中胶管、铝管承受加压后所产生之压缩应力及拉伸应力情况；

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